US 11,942,920 B2
Low-loss and wide-band acoustic delay lines using x-cut and y-cut lithium niobate piezoelectric thin films
Ruochen Lu, Champaign, IL (US); Tomas Manzaneque Garcia, Voorburg (NL); Yansong Yang, Urbana, IL (US); and Songbin Gong, Champaign, IL (US)
Assigned to The Board of Trustees of the University of Illinois, Urbana, IL (US)
Filed by Board of Trustees of the University of Illinois, Urbana, IL (US)
Filed on Oct. 16, 2020, as Appl. No. 17/073,059.
Claims priority of provisional application 62/923,213, filed on Oct. 18, 2019.
Prior Publication US 2021/0119606 A1, Apr. 22, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/02 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01); H03H 9/72 (2006.01); H04L 5/14 (2006.01)
CPC H03H 9/02228 (2013.01) [H03H 9/02543 (2013.01); H03H 9/02559 (2013.01); H03H 9/02574 (2013.01); H03H 9/02637 (2013.01); H03H 9/02842 (2013.01); H03H 9/145 (2013.01); H03H 9/14505 (2013.01); H03H 9/14511 (2013.01); H03H 9/25 (2013.01); H03H 9/725 (2013.01); H04L 5/1461 (2013.01)] 25 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a piezoelectric thin film located above a carrier substrate, wherein the piezoelectric thin film is one of an X-cut or a Y-cut lithium niobate (LiNbO3) thin film adapted to propagate an acoustic wave in at least one of:
a first mode excited by an electric field oriented in a longitudinal direction along a length of the piezoelectric thin film; or
a second mode excited by the electric field oriented at least partially in a thickness direction of the piezoelectric thin film;
a first interdigitated transducer (IDT) disposed on a first end of the piezoelectric thin film, the first IDT to convert a first electromagnetic signal, traveling in the longitudinal direction, into the acoustic wave; and
a second IDT disposed on a second end of the piezoelectric thin film with a gap between the second IDT and the first IDT, the second IDT to convert the acoustic wave into a second electromagnetic signal, and the gap to determine a time delay of the acoustic wave before output of the second electromagnetic signal.