CPC H01L 27/14636 (2013.01) [H01L 23/467 (2013.01); H01L 27/14634 (2013.01); H01L 27/1469 (2013.01); H01L 31/024 (2013.01)] | 13 Claims |
1. An image sensor, comprising:
a logic die, comprising:
a function logic element disposed on a bond side of the logic die; and
a logic oxide array of raised logic oxide features disposed on the bond side of the logic die;
a pixel die that is stacked on top of the logic die, the pixel die comprising:
a pixel array disposed on a light receiving side of the pixel die; and
a pixel oxide array of raised pixel oxide features disposed on a bond side of the pixel die;
a plurality of outer bonds disposed between an outer region of the logic die and an outer region of the pixel die; and
a plurality of inner bonds formed at an inner region of the image sensor between the pixel oxide array and the logic oxide array, the inner bonds being spaced apart by a plurality of fluidly connected air gaps extending between the logic die and the pixel die,
wherein the raised logic oxide features comprise a plurality of logic oxide stripes and the raised pixel oxide features comprise a plurality of pixel oxide stripes, wherein no logic oxide stripe extends in the same direction as any pixel oxide stripe.
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