US 11,942,490 B2
Photon counting radiation detector and radiographic inspection device using the same
Kuniyuki Kakushima, Yokohama Kanagawa (JP); Akito Sasaki, Yokohama Kanagawa (JP); Atsuya Sasaki, Yokohama Kanagawa (JP); and Hideaki Hirabayashi, Yokohama Kanagawa (JP)
Assigned to KABUSHIKI KAISHA TOSHIBA, Tokyo (JP); and TOSHIBA MATERIALS CO., LTD., Yokohama (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP); and TOSHIBA MATERIALS CO., LTD., Yokohama (JP)
Filed on Feb. 18, 2021, as Appl. No. 17/178,791.
Application 17/178,791 is a continuation of application No. PCT/JP2019/040962, filed on Oct. 17, 2019.
Claims priority of application No. 2018-200616 (JP), filed on Oct. 25, 2018.
Prior Publication US 2021/0175268 A1, Jun. 10, 2021
Int. Cl. H01L 27/146 (2006.01); G01T 1/24 (2006.01); H01L 31/0224 (2006.01); H01L 31/028 (2006.01); H01L 31/0296 (2006.01); H01L 31/0304 (2006.01); H01L 31/0312 (2006.01); H01L 31/032 (2006.01)
CPC H01L 27/14607 (2013.01) [G01T 1/241 (2013.01); H01L 27/14659 (2013.01); H01L 31/022408 (2013.01); H01L 31/028 (2013.01); H01L 31/0296 (2013.01); H01L 31/0304 (2013.01); H01L 31/03044 (2013.01); H01L 31/0312 (2013.01); H01L 31/032 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A photon counting radiation detector, comprising:
a cell structure including
a substrate, and
an epitaxial layer provided on the substrate, radiation being incident on the epitaxial layer;
an inclination θ of the substrate satisfying Formula (1) below, where tsub is a thickness of the substrate, tepi is a thickness of the epitaxial layer, L is a length of the substrate, and the inclination θ is an inclination of the substrate with respect to an incident direction of the radiation and is greater than 0°:

OG Complex Work Unit Math