US 11,942,450 B2
Device and method of fluidic assembly of microchips on a substrate
Melina Haupt, La Combe de Lancey (FR)
Assigned to Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Paris (FR); and Centre National de la Recherche Scientifique, Paris (FR)
Filed by Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Paris (FR); and Centre National de la Recherche Scientifique, Paris (FR)
Filed on Nov. 18, 2021, as Appl. No. 17/529,365.
Claims priority of application No. 2011965 (FR), filed on Nov. 20, 2020.
Prior Publication US 2022/0165702 A1, May 26, 2022
Int. Cl. H01L 23/00 (2006.01); H01L 25/075 (2006.01)
CPC H01L 24/75 (2013.01) [H01L 24/95 (2013.01); H01L 25/075 (2013.01); H01L 24/13 (2013.01); H01L 24/14 (2013.01); H01L 24/81 (2013.01); H01L 2224/13011 (2013.01); H01L 2224/13014 (2013.01); H01L 2224/13016 (2013.01); H01L 2224/1415 (2013.01); H01L 2224/75655 (2013.01); H01L 2224/7598 (2013.01); H01L 2224/81085 (2013.01); H01L 2224/95085 (2013.01); H01L 2224/95101 (2013.01)] 18 Claims
OG exemplary drawing
 
1. Cell of fluidic assembly of microchips on a substrate, comprising:
a base having its upper surface intended to receive the substrate;
a body laterally delimiting a fluidic chamber above the substrate; and
a cover closing the fluidic chamber from its upper surface, wherein the body comprises first and second nozzles respectively emerging onto opposite first and second lateral edges of the fluidic chamber, each of the first and second nozzles being adapted to injecting and/or sucking in a liquid suspension of microchips into and/or from the fluidic chamber, in a direction parallel to the mean plane of the substrate.