US 11,942,415 B2
Thin film based passive devices and methods of forming the same
Handoko Linewih, Singapore (SG); Chor Shu Cheng, Singapore (SG); Tze Ho Simon Chan, Singapore (SG); and Yudi Setiawan, Singapore (SG)
Assigned to GLOBALFOUNDRIES Singapore Pte. Ltd., Singapore (SG)
Filed by GLOBALFOUNDRIES Singapore Pte. Ltd., Singapore (SG)
Filed on Aug. 16, 2022, as Appl. No. 17/888,532.
Application 17/888,532 is a division of application No. 16/587,122, filed on Sep. 30, 2019, abandoned.
Prior Publication US 2022/0392837 A1, Dec. 8, 2022
Int. Cl. H01L 23/522 (2006.01); H01L 21/70 (2006.01); H01L 49/02 (2006.01)
CPC H01L 23/5223 (2013.01) [H01L 21/707 (2013.01); H01L 23/5226 (2013.01); H01L 23/5228 (2013.01); H01L 28/24 (2013.01); H01L 28/40 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A device comprising:
a substrate;
an interlevel dielectric arranged over the substrate, the interlevel dielectric comprising: a first interlevel dielectric layer in an interconnect level i, the first interlevel dielectric layer having a first interconnect and a second interconnect therein;
a nitride block insulator arranged over the first interlevel dielectric layer and over the first interconnect and the second interconnect;
an opening arranged in the nitride block insulator, the opening extending through the nitride block insulator to expose a surface of the first interconnect in the first interlevel dielectric layer;
a contact plug arranged in the opening of the nitride block insulator, wherein the contact plug at least lines the opening and partially fills the opening, wherein the contact plug lines a bottom and sidewalls of the opening in the nitride block insulator without completely filling the opening, thereby preventing out-diffusion of conductive material from the first interconnect; and
a first film of a passive component arranged over the nitride block insulator and over the contact plug, wherein the first film conforms to a topography of the nitride block insulator and the contact plug by directly lining a bottom and sidewalls of the contact plug in the opening and directly contacting the nitride block insulator beyond the opening.