US 11,942,381 B2
System for non radial temperature control for rotating substrates
Wolfgang R. Aderhold, Cupertino, CA (US); Aaron Muir Hunter, Santa Cruz, CA (US); and Joseph M. Ranish, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Aug. 10, 2020, as Appl. No. 16/989,543.
Application 16/989,543 is a division of application No. 15/637,944, filed on Jun. 29, 2017, granted, now 10,741,457.
Application 13/548,858 is a division of application No. 12/434,239, filed on May 1, 2009, granted, now 8,249,436, issued on Aug. 21, 2012.
Application 15/637,944 is a continuation of application No. 14/247,816, filed on Apr. 8, 2014, granted, now 9,728,471, issued on Aug. 8, 2017.
Application 14/247,816 is a continuation of application No. 13/548,858, filed on Jul. 13, 2012, granted, now 8,724,977, issued on May 13, 2014.
Claims priority of provisional application 61/055,814, filed on May 23, 2008.
Claims priority of provisional application 61/050,167, filed on May 2, 2008.
Prior Publication US 2020/0373212 A1, Nov. 26, 2020
Int. Cl. H01L 21/66 (2006.01); H01L 21/324 (2006.01); H01L 21/67 (2006.01)
CPC H01L 22/26 (2013.01) [H01L 21/324 (2013.01); H01L 21/67115 (2013.01); H01L 21/67248 (2013.01); H01L 22/10 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A processing chamber, comprising:
a chamber body defining a processing volume;
a quartz window;
a reflector;
a substrate support disposed in the processing volume, wherein the substrate support comprises a substrate supporting surface;
a first heating source operable to direct energy towards the processing volume through the quartz window, wherein the heating source comprises a plurality of heating elements grouped in a plurality of concentric heating zones;
a plurality of pulsed zones comprising one or more heating elements of the plurality of heating elements, wherein the one or more heating elements in at least one zone of the plurality of pulsed zones are configured to be powered in one or more of a different phase or a different amplitude from one or more other heating elements of the plurality of heating elements in a corresponding concentric zone; and
a temperature sensor.