CPC H01L 21/6833 (2013.01) [H01J 37/32715 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/334 (2013.01)] | 8 Claims |
1. An electrostatic chuck comprising:
a base having a surface on which an object is to be placed; and
a through hole extending through the base,
wherein a porous material containing angular ceramic particles is disposed in the through hole, and
wherein the porous material includes oxides of two or more elements in addition to the angular ceramic particles, the oxides of two or more elements adhering to a portion of an outer surface of the angular ceramic particles to support the angular ceramic particles, and the oxides of two or more elements bonding and integrating the angular ceramic particles.
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