CPC H01L 21/67733 (2013.01) [H01L 21/67727 (2013.01); H01L 21/6773 (2013.01); H01L 21/67736 (2013.01); H01L 21/67769 (2013.01); B65G 1/0414 (2013.01); B65G 1/0485 (2013.01); B65G 1/065 (2013.01); B65G 2201/0297 (2013.01)] | 7 Claims |
1. A storage system comprising:
an overhead stocker including an overhead crane track, shelving in which a plurality of tiers of storages to accommodate articles therein are arranged vertically, and a crane to travel along the overhead crane track and transfer an article between the plurality of tiers of storages;
an overhead transport vehicle system to perform receiving or delivering of an article from or to a predetermined transfer destination;
a transporter to vertically transport an article between the overhead stocker and the overhead transport vehicle system; and
a receiving/delivering port to receive or deliver an article between the overhead transport vehicle system and the transporter; wherein
the overhead transport vehicle system is provided below a lower end of the overhead stocker;
the transporter includes:
a transporter lift driver to raise or lower an article being held; and
a transporter lateral extender to move the transporter lift driver laterally between a position above the receiving/delivering port and a position above at least one of the plurality of tiers of storages;
the transporter is capable of receiving or delivering an article from or to the receiving/delivering port by raising or lowering the article via the transporter lift driver in a state in which the transporter lift driver is situated above the receiving/delivering port; and
the transporter is capable of receiving or delivering an article from or to the storage that is present below the transporter lift driver by raising or lowering the article via the transporter lift driver in a state in which the transporter lift driver is situated above at least one of the plurality of tiers of storages.
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