US 11,942,342 B2
Conveying system and method for operating the same
Fu-Hsien Li, Taichung (TW); Chi-Feng Tung, Miaoli County (TW); and Hsiang Yin Shen, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed on Aug. 18, 2021, as Appl. No. 17/406,006.
Application 17/406,006 is a continuation of application No. 16/425,305, filed on May 29, 2019, granted, now 11,107,713.
Prior Publication US 2021/0384052 A1, Dec. 9, 2021
Int. Cl. H01L 21/67 (2006.01); B65G 49/07 (2006.01); B66C 7/08 (2006.01); B66C 13/18 (2006.01); G05B 19/418 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67242 (2013.01) [B65G 49/07 (2013.01); B66C 7/08 (2013.01); B66C 13/18 (2013.01); G05B 19/41815 (2013.01); H01L 21/67727 (2013.01); G05B 2219/45031 (2013.01); H01L 21/67005 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A conveying system, comprising:
a rail;
a first conveying unit displaced along the rail at a first speed, wherein the first conveying unit includes a first housing, a first gripping member disposed inside the first housing and moveable into and out of the first housing, a first sensor disposed on the first gripping member, and a first unit controller disposed on the first gripping member;
a first vibration measurement obtained by the first sensor upon the displacement of the first conveying unit along the rail at the first speed;
a central controller configured to control the first conveying unit and analysis the first vibration measurement;
a first signal based on the analysis of the first vibration measurement and transmitted from the first unit controller to the central controller;
a second conveying unit displaced along the rail at a second speed, wherein the second conveying unit includes a second housing, a second gripping member disposed inside the second housing, a second sensor disposed on the second gripping member and a second unit controller disposed on the second gripping member; and
a first feedback signal based on the first signal and transmitted from the central controller to the second unit controller;
wherein the second speed is based on the first feedback signal.