US 11,942,341 B2
Adaptive focusing and transport system for electroplating
Arthur Keigler, Billerica, MA (US); David G. Guarnaccia, Billerica, MA (US); Freeman Fisher, Billerica, MA (US); Demetrius Papapanayiotou, Billerica, MA (US); Jonathan Haynes, Billerica, MA (US); and Daniel L. Goodman, Billerica, MA (US)
Assigned to ASMPT NEXX, INC., Billerica, MA (US)
Filed by ASMPT NEXX, INC., Billerica, MA (US)
Filed on Jan. 26, 2022, as Appl. No. 17/584,852.
Prior Publication US 2022/0148891 A1, May 12, 2022
Int. Cl. H01L 21/67 (2006.01); H01L 21/68 (2006.01)
CPC H01L 21/6723 (2013.01) [H01L 21/67259 (2013.01); H01L 21/681 (2013.01)] 8 Claims
OG exemplary drawing
 
1. An electrochemical deposition system for depositing metal features onto a workpiece at respective target locations of the workpiece, the workpiece having a pattern of target locations, the system comprising:
a deposition chamber adapted to receive plating solution when in use,
a workpiece holder for holding the workpiece in a first plane, the workpiece holder being adapted for insertion into and removal from the deposition chamber while holding the workpiece,
a shield comprising a substantially planar plate having a pattern of apertures formed therein, the pattern of apertures substantially corresponding to the target locations in use,
a shield holder for holding the shield in a second plane substantially parallel to the first plane, the shield holder being adapted for insertion into and removal from the deposition chamber while holding the shield,
a positioning mechanism that includes a pivot rotate opener (PRO) that is movable to a plurality of different orientations each aligned with a respective plane, the PRO being arranged and operative to receive the workpiece holder while in a first one of the plurality of different orientations aligned with a first plane,
the positioning mechanism being arranged to receive a workpiece from storage, and operative to align, with actuators, the workpiece such that the target locations substantially align with the pattern of apertures of the shield while the shield is held by the shield holder during deposition of metal on the target locations in the deposition chamber, the PRO being movable to a second one of the plurality of different orientations aligned with a second plane that is different from the first plane to receive the aligned workpiece within the workpiece holder that is in the PRO, and
a transporter operative to transport the workpiece holder that holds the aligned workpiece from the PRO to the deposition chamber.