US 11,942,339 B2
Sheet attaching apparatus
Yoshinori Kakinuma, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Jan. 26, 2022, as Appl. No. 17/649,004.
Claims priority of application No. 2021-019394 (JP), filed on Feb. 9, 2021.
Prior Publication US 2022/0254664 A1, Aug. 11, 2022
Int. Cl. H01L 21/67 (2006.01); B29C 63/00 (2006.01); B29C 63/02 (2006.01); B29K 101/12 (2006.01); B29L 31/34 (2006.01)
CPC H01L 21/67132 (2013.01) [B29C 63/0004 (2013.01); B29C 63/02 (2013.01); B29K 2101/12 (2013.01); B29L 2031/34 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A sheet attaching apparatus for attaching a sheet to a plate-shaped workpiece to form a sheeted workpiece, the sheet attaching apparatus comprising:
a sheet attaching section that attaches the sheet having an area larger than that of the workpiece to the workpiece; and
a sheet cutting section that cuts off the sheet attached by the sheet attaching section from the workpiece along a periphery of the workpiece,
wherein the sheet cutting section includes
a chuck table that holds the workpiece by a holding surface smaller than the workpiece,
a sheet holding section including sheet holding plates that are movable toward and away from each other, wherein the sheet holding plates detachably hold a peripheral portion of the sheet attached to the workpiece held by the chuck table, and wherein the sheet holding plates are movable between a holding position in which the sheet holding plates hold the peripheral portion of the sheet, and a holding release position in which the sheet holding plates move away from the peripheral portion of the sheet,
a sheet accommodating section that accommodates the sheet cut and dropped due to release of holding by the sheet holding section, and
a cutter of the sheet cutting section that cooperates with a pressing section that presses the cut sheet toward the sheet accommodating section.