US 11,942,338 B2
Apparatus for manufacturing display device
Jong Jang Park, Suwon-si (KR); Seok Soon Back, Suwon-si (KR); and Sung Hune Yoo, Hwaseong-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Jun. 15, 2021, as Appl. No. 17/348,316.
Claims priority of application No. 10-2020-0078370 (KR), filed on Jun. 26, 2020.
Prior Publication US 2021/0407828 A1, Dec. 30, 2021
Int. Cl. H01L 21/67 (2006.01); H01L 27/12 (2006.01)
CPC H01L 21/67109 (2013.01) [H01L 27/1259 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus for manufacturing a display device, the apparatus comprising:
a chamber in which an inner space is defined;
a heating member disposed in the inner space of the chamber to provide a thermal atmosphere inside the chamber, wherein the heating member includes a first heater and a second heater facing each other;
a height adjustment member including an end disposed between the first heater and the second heater; and
a driving unit which drives the end of the height adjustment member to move up or down such that the end of the height adjustment member is located at one of a first height and a second height which are different heights between the first heater and the second heater,
wherein the first heater is disposed at a lower part of the inner space of the chamber, the second heater is disposed at an upper part of the inner space of the chamber, and the end of the height adjustment member is disposes at a middle part of the inner space of the chamber, and
wherein each of the first height and the second height is different from a height of a top surface of the first heater, and different from a height of a bottom surface of the second heater facing the top surface of the first heater.