CPC H01J 37/32284 (2013.01) [H01J 37/3053 (2013.01); H01L 21/3065 (2013.01); H01L 21/67069 (2013.01); H05H 1/24 (2013.01)] | 12 Claims |
1. A bias supply to apply a periodic voltage comprising:
an output node;
a return node;
a resonant switch section comprising:
a first node, a second node, and a third node;
a first current pathway between the first node and the second node, the first current pathway comprising a series combination of a switch and a diode;
a second current pathway between the second node and the third node comprising a diode and an inductive element; and
a power section comprising:
a first voltage source coupled between the third node and the first node; and
a second voltage source coupled to the return node;
wherein closing the switch causes unidirectional current in the first and second current pathways to cause an application of the periodic voltage between the output node and the return node.
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