US 11,942,309 B2
Bias supply with resonant switching
Maneesh Kumar Singh, Fort Collins, CO (US)
Assigned to Advanced Energy Industries, Inc., Denver, CO (US)
Filed by Advanced Energy Industries, Inc., Fort Collins, CO (US)
Filed on Jan. 26, 2022, as Appl. No. 17/584,940.
Prior Publication US 2023/0253187 A1, Aug. 10, 2023
Int. Cl. H01J 37/32 (2006.01); H01J 37/305 (2006.01); H01L 21/3065 (2006.01); H01L 21/67 (2006.01); H05H 1/24 (2006.01)
CPC H01J 37/32284 (2013.01) [H01J 37/3053 (2013.01); H01L 21/3065 (2013.01); H01L 21/67069 (2013.01); H05H 1/24 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A bias supply to apply a periodic voltage comprising:
an output node;
a return node;
a resonant switch section comprising:
a first node, a second node, and a third node;
a first current pathway between the first node and the second node, the first current pathway comprising a series combination of a switch and a diode;
a second current pathway between the second node and the third node comprising a diode and an inductive element; and
a power section comprising:
a first voltage source coupled between the third node and the first node; and
a second voltage source coupled to the return node;
wherein closing the switch causes unidirectional current in the first and second current pathways to cause an application of the periodic voltage between the output node and the return node.