US 11,942,305 B2
Data generation method, charged particle beam irradiation device, and computer-readable recording medium
Kenichi Yasui, Kawasaki (JP)
Assigned to NuFlare Technology, Inc., Yokohama (JP)
Filed by NuFlare Technology, Inc., Yokohama (JP)
Filed on Jun. 20, 2022, as Appl. No. 17/844,360.
Claims priority of application No. 2021-130792 (JP), filed on Aug. 10, 2021.
Prior Publication US 2023/0053272 A1, Feb. 16, 2023
Int. Cl. H01J 37/302 (2006.01); H01J 37/317 (2006.01)
CPC H01J 37/302 (2013.01) [H01J 37/3177 (2013.01); H01J 2237/22 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A charged particle beam irradiation method, comprising:
generating a plurality of parametric elements by dividing, at positions of an extremum and an inflection point, a parametric curve that expresses a shape of a writing pattern and is defined by a plurality of control points arranged in order in a predetermined direction;
generating a polygon by extracting, for each of the parametric elements, one or some of the plurality of control points and connecting the extracted control points in order in the predetermined direction;
calculating a coverage by the polygon in each of a plurality of rectangular segmented regions obtained by dividing a target to be irradiated with a charged particle beam into a predetermined size;
calculating a coverage of each segmented region in a peripheral part of the writing pattern by finding intersections of each of the plurality of parametric elements and four sides of each of the plurality of segmented regions;
calculating an irradiation amount of each segmented region based on the calculated coverage; and
controlling a charged particle beam irradiation apparatus to irradiate the target with the charged particle beam at the calculated irradiation amount to write a pattern onto the target.