US 11,942,304 B2
Field programmable detector array
Yongxin Wang, San Ramon, CA (US); Zhonghua Dong, Sunnyvale, CA (US); and Rui-Ling Lai, Chang-Hua (TW)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
Filed on Jul. 1, 2022, as Appl. No. 17/856,848.
Application 17/856,848 is a continuation of application No. 16/648,288, granted, now 11,430,629, previously published as PCT/EP2018/074833, filed on Sep. 14, 2018.
Claims priority of provisional application 62/560,135, filed on Sep. 18, 2017.
Prior Publication US 2022/0415608 A1, Dec. 29, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/244 (2006.01); H01L 27/146 (2006.01)
CPC H01J 37/244 (2013.01) [H01L 27/14603 (2013.01); H01L 27/14609 (2013.01); H01J 2237/2446 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A detector comprising:
a substrate comprising a plurality of sensing elements including a first element, a second element, and a switching region configured to connect the first element and the second element, the switching region being configured to form an active sensing area between the first element and the second element,
wherein the first element is configured to generate a first signal in response to the first element detecting first charged particles that indicate a beam, and the second element is configured to generate a second signal in response to the second element detecting second charged particles that indicate the beam, and
wherein the switching region is configured to group together the first element and the second element.