US 11,942,303 B2
Systems and methods for real time stereo imaging using multiple electron beams
Yan Ren, Eindhoven (NL); and Albertus Victor Gerardus Mangnus, Eindhoven (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/359,365
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Dec. 6, 2019, PCT No. PCT/EP2019/083982
§ 371(c)(1), (2) Date Jun. 25, 2021,
PCT Pub. No. WO2020/141041, PCT Pub. Date Jul. 9, 2020.
Claims priority of provisional application 62/787,098, filed on Dec. 31, 2018.
Prior Publication US 2023/0154723 A1, May 18, 2023
Int. Cl. H01J 37/147 (2006.01); G01N 23/2251 (2018.01); H01J 37/09 (2006.01); H01J 37/145 (2006.01); H01J 37/20 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/1478 (2013.01) [G01N 23/2251 (2013.01); H01J 37/09 (2013.01); H01J 37/145 (2013.01); H01J 37/1474 (2013.01); H01J 37/20 (2013.01); H01J 37/28 (2013.01); G01N 2223/07 (2013.01); G01N 2223/418 (2013.01); G01N 2223/507 (2013.01); H01J 2237/0455 (2013.01); H01J 2237/04926 (2013.01); H01J 2237/103 (2013.01); H01J 2237/151 (2013.01); H01J 2237/226 (2013.01); H01J 2237/2611 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A multi-beam apparatus configured to emit multiple charged-particle beams for imaging a top of and a side of a structure of a sample, the apparatus comprising:
a deflector array including a first deflector and configured to receive a first charged-particle beam and a second charged-particle beam;
a blocking plate configured to block one of the first charged-particle beam and the second charged-particle beam;
a moveable objective lens; and
a controller having circuitry and configured to change the configuration of the apparatus to transition between a first mode and a second mode, wherein:
in the first mode:
the deflector array is configured to direct the second charged-particle beam to image the top of the structure,
the moveable objective lens is configured to be positioned at a first location to focus the second charged-particle beam onto the top of the structure, and
the blocking plate is configured to block the first charged-particle beam, and
in the second mode:
the first deflector is configured to deflect the first charged-particle beam to image the side of the structure,
the moveable objective lens is configured to be positioned at a second location different from the first location to focus the first charged-particle beam onto the side of the structure, and
the blocking plate is configured to block the second charged-particle beam.