US 11,942,302 B2
Pulsed charged-particle beam system
Arno Jan Bleeker, Westerhoven (NL); Pieter Willem Herman De Jager, Middelbeers (NL); Maikel Robert Goosen, Eindhoven (NL); Erwin Paul Smakman, Eindhoven (NL); Albertus Victor Gerardus Mangnus, Eindhoven (NL); Yan Ren, Eindhoven (NL); and Adam Lassise, Den Bosch (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/361,119
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Dec. 17, 2019, PCT No. PCT/EP2019/085706
§ 371(c)(1), (2) Date Jun. 28, 2021,
PCT Pub. No. WO2020/136044, PCT Pub. Date Jul. 2, 2020.
Claims priority of provisional application 62/942,671, filed on Dec. 2, 2019.
Claims priority of provisional application 62/786,268, filed on Dec. 28, 2018.
Prior Publication US 2023/0154722 A1, May 18, 2023
Int. Cl. H01J 37/09 (2006.01); H01J 37/147 (2006.01); H01J 37/244 (2006.01); H01J 37/26 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/1474 (2013.01) [H01J 37/244 (2013.01); H01J 37/265 (2013.01); H01J 37/28 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/2817 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An apparatus for observing a sample, comprising:
a deflector configured to form a plurality of deflected charged-particle beams from a primary charged-particle beam comprising a plurality of pulses of charged particles and deflect the plurality of pulses of charged particles to a plurality of probe spots on a sample;
a detector configured to detect a plurality of signals from the sample that result from the plurality of pulses interacting with the sample; and
a controller configured to correlate a particular detected signal to a particular probe spot on the sample based on a correlation between a time that the particular signal generated from the particular probe spot was detected and a time associated with a time that a particular charged particle pulse forming the particular probe spot was deflected.