US 11,942,231 B2
Airtight box for measurement, airtight apparatus, measurement system and measurement apparatus
Koichiro Ito, Tokyo (JP); Tetsuya Ozawa, Tokyo (JP); and Takeshi Ozawa, Tokyo (JP)
Assigned to RIGAKU CORPORATION, Akishima (JP)
Filed by RIGAKU CORPORATION, Akishima (JP)
Filed on Nov. 17, 2020, as Appl. No. 16/950,081.
Claims priority of application No. 2019-215183 (JP), filed on Nov. 28, 2019.
Prior Publication US 2021/0166829 A1, Jun. 3, 2021
Int. Cl. G21F 7/04 (2006.01); G01N 23/20016 (2018.01); G01N 23/20025 (2018.01); G21F 7/047 (2006.01); G01N 35/00 (2006.01)
CPC G21F 7/04 (2013.01) [G21F 7/047 (2013.01); G01N 23/20016 (2013.01); G01N 23/20025 (2013.01); G01N 35/00 (2013.01); G01N 2035/00277 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An airtight apparatus comprising:
an airtight box for measurement for placing therein a sample to be measured by a measurement apparatus installed outside; and
a glove box connected to the airtight box for measurement,
wherein the glove box includes an opening portion,
wherein the airtight box for measurement comprises:
a housing that is hollow therein and has an opening in a side end surface and a connecting unit for causing the opening to communicate with the opening portion of the glove box;
a sample stage including a sample loading portion;
a measurement window that is provided in the housing to measure a sample loaded on the sample stage from the outside by the measurement apparatus; and
a transport stage that is installed in the housing and transports the sample stage,
wherein the transport stage is configured to extend a transport track of the sample stage up to the inside of the glove box communicating with the inside of the housing.