CPC G03F 7/70033 (2013.01) [G03F 7/70916 (2013.01); H05G 2/006 (2013.01)] | 20 Claims |
1. A tin trap device for collecting tin in a chamber device which causes tin to be turned into plasma with laser light in an internal space thereof, comprising:
a housing provided with a gas inlet port through which exhaust gas in the chamber device flows and a gas exhaust port through which the exhaust gas is exhausted; and
a main heater arranged in the housing, configured to have a temperature equal to or higher than the melting point of tin and lower than the boiling point thereof, and having a projection surface projected toward a direction in which the exhaust gas flows in the gas inlet port cover the gas inlet port.
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