US 11,940,736 B2
Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
Gota Niimi, Oyama (JP); Yoshifumi Ueno, Oyama (JP); and Shinji Nagai, Oyama (JP)
Assigned to Gigaphoton Inc., Tochigi (JP)
Filed by Gigaphoton Inc., Tochigi (JP)
Filed on Aug. 10, 2021, as Appl. No. 17/398,054.
Application 17/398,054 is a continuation of application No. PCT/JP2019/009521, filed on Mar. 8, 2019.
Prior Publication US 2021/0364928 A1, Nov. 25, 2021
Int. Cl. G03F 7/00 (2006.01); H05G 2/00 (2006.01)
CPC G03F 7/70033 (2013.01) [G03F 7/70916 (2013.01); H05G 2/006 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A tin trap device for collecting tin in a chamber device which causes tin to be turned into plasma with laser light in an internal space thereof, comprising:
a housing provided with a gas inlet port through which exhaust gas in the chamber device flows and a gas exhaust port through which the exhaust gas is exhausted; and
a main heater arranged in the housing, configured to have a temperature equal to or higher than the melting point of tin and lower than the boiling point thereof, and having a projection surface projected toward a direction in which the exhaust gas flows in the gas inlet port cover the gas inlet port.