US 11,940,726 B2
Mask protective module, pellicle having the same, and lithography apparatus having the same
Jinho Ahn, Seoul (KR); Jung Hwan Kim, Seoul (KR); and Seongchul Hong, Seoul (KR)
Assigned to INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY, Seoul (KR)
Filed by INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY, Seoul (KR)
Filed on Jun. 28, 2022, as Appl. No. 17/851,580.
Application 17/851,580 is a division of application No. 16/298,991, filed on Mar. 11, 2019, granted, now 11,402,746.
Application 16/298,991 is a continuation of application No. PCT/KR2016/010478, filed on Sep. 20, 2016.
Claims priority of application No. 10-2016-0117214 (KR), filed on Sep. 12, 2016.
Prior Publication US 2022/0334467 A1, Oct. 20, 2022
Int. Cl. G03F 1/66 (2012.01); G03F 1/00 (2012.01); G03F 1/62 (2012.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC G03F 1/66 (2013.01) [G03F 1/00 (2013.01); G03F 1/62 (2013.01); G03F 7/20 (2013.01); G03F 7/70008 (2013.01); G03F 7/70983 (2013.01); H01L 21/027 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A lithography apparatus comprising:
a light source for emitting light;
a mask mounting zone where a mask for reflecting the light is disposed; and
a mask protective module disposed on the mask to transmit the light from the light source toward the mask, and
a penetration region replacing device,
wherein the penetration region replacing device comprises:
a rod; and
a penetration region mounting unit connected to an end of the rod and configured to turn on the rod as an axis, wherein the penetration region mounting unit comprises a plurality of penetration region modules providing a penetration region of a membrane and turns to provide a new penetration region module not used on the mask protective module,
wherein the mask protective module comprises,
a frame; and
the membrane supported by the frame,
wherein the membrane includes the penetration region for transmitting the light and a peripheral region of which a light transmittance is lower than that of the penetration region.