US 11,940,663 B2
Optical device
Hidetaka Nishi, Tokyo (JP); and Shinji Matsuo, Tokyo (JP)
Assigned to Nippon Telegraph and Telephone Corporation, Tokyo (JP)
Appl. No. 17/612,505
Filed by Nippon Telegraph and Telephone Corporation, Tokyo (JP)
PCT Filed May 28, 2019, PCT No. PCT/JP2019/021067
§ 371(c)(1), (2) Date Nov. 18, 2021,
PCT Pub. No. WO2020/240689, PCT Pub. Date Dec. 3, 2020.
Prior Publication US 2022/0206235 A1, Jun. 30, 2022
Int. Cl. G02B 6/43 (2006.01); G02B 6/122 (2006.01); G02B 6/42 (2006.01); H01L 31/0232 (2014.01); H01L 31/101 (2006.01); H01L 31/108 (2006.01)
CPC G02B 6/43 (2013.01) [G02B 6/1226 (2013.01); G02B 6/4212 (2013.01); H01L 31/02327 (2013.01); H01L 31/101 (2013.01); H01L 31/108 (2013.01)] 10 Claims
OG exemplary drawing
 
1. An optical device comprising:
a core on a substrate, wherein the core comprises a semiconductor material;
a first source electrode and a second source electrode respectively in contact with opposite side surfaces of the core that is interposed between the first source electrode and the second source electrode, wherein the first source electrode comprises a first metal material and the second source electrode comprises a second metal material, and wherein the core, the first source electrode, and the second source electrode together define a plasmonic waveguide; and
a drain electrode in contact with an upper surface of the core, wherein the drain electrode comprises a third metal material.