US 11,940,659 B2
Optical integrated circuit structure including edge coupling protective features and methods of forming same
Chen-Hao Huang, Taoyuan (TW); Hau-Yan Lu, Hsinchu (TW); Sui-Ying Hsu, New Taipei (TW); Yuehying Lee, Hsinchu (TW); Chien-Ying Wu, Hsinchu (TW); and Chia-Ping Lai, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company Limited, Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company Limited, Hsinchu (TW)
Filed on Aug. 30, 2021, as Appl. No. 17/460,789.
Prior Publication US 2023/0069212 A1, Mar. 2, 2023
Int. Cl. G02B 6/12 (2006.01); G02B 6/136 (2006.01); G02B 6/30 (2006.01); G02B 6/42 (2006.01); H01L 23/532 (2006.01); H01L 21/306 (2006.01); H01L 21/3065 (2006.01); H01L 21/311 (2006.01); H01L 23/522 (2006.01); H01L 23/58 (2006.01)
CPC G02B 6/4248 (2013.01) [G02B 6/12 (2013.01); G02B 6/12002 (2013.01); G02B 6/12004 (2013.01); G02B 6/136 (2013.01); G02B 6/4206 (2013.01); G02B 6/4274 (2013.01); H01L 23/53228 (2013.01); G02B 6/30 (2013.01); G02B 6/4228 (2013.01); G02B 6/4236 (2013.01); H01L 21/30604 (2013.01); H01L 21/3065 (2013.01); H01L 21/31116 (2013.01); H01L 23/5226 (2013.01); H01L 23/585 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An optical integrated circuit (IC) structure comprising:
a substrate comprising a fiber slot formed in an upper surface of the substrate and extending from an edge of the substrate, and an undercut formed in the upper surface and extending from the fiber slot;
a semiconductor layer disposed on the substrate;
a dielectric structure disposed on the semiconductor layer;
an interconnect structure disposed in the dielectric structure;
a plurality of vents that extend through a coupling region of the dielectric structure, wherein the plurality of vents each expose the undercut;
a fiber cavity that extends through the coupling region of the dielectric structure and exposes the fiber slot; and
a barrier ring disposed in the dielectric structure, wherein the barrier ring surrounds the interconnect structure and is routed around a perimeter of the coupling region.