US 11,940,619 B2
Mirror device and production method for a mirror device
Gael Pilard, Wankheim (DE)
Assigned to Robert Bosch GmbH, Stuttgart (DE)
Appl. No. 17/255,880
Filed by Robert Bosch GmbH, Stuttgart (DE)
PCT Filed Jun. 18, 2019, PCT No. PCT/EP2019/066038
§ 371(c)(1), (2) Date Dec. 23, 2020,
PCT Pub. No. WO2020/011495, PCT Pub. Date Jan. 16, 2020.
Claims priority of application No. 102018211545.1 (DE), filed on Jul. 11, 2018.
Prior Publication US 2021/0263304 A1, Aug. 26, 2021
Int. Cl. G02B 26/08 (2006.01); G02B 26/10 (2006.01)
CPC G02B 26/101 (2013.01) [G02B 26/0833 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A mirror device, comprising:
a pivotably mounted micromirror having a reflective surface upon which a beam of light impinges, which is emitted by a light source of the mirror device or by an external light source, the micromirror being excitable from a neutral position of the micromirror to an oscillatory motion about an axis of rotation such that a first impingement angle of the light beam impinging upon the oscillating micromirror varies within a first value range; and
a cover element which is immovable in relation to a mounting of the micromirror and is transparent to the beam of light emitted by the light source or the external light source, the cover element being positioned relative to the micromirror in such a way that the beam of light emitted by the light source or the external light source impinges through the cover element upon the reflective surface of the micromirror and due to a reflection at the reflective surface, impinges upon an inner surface of the cover element, a portion of the light impinging upon the inner surface impinging upon the reflective surface as a reflection beam, and the cover element is inclined at an angle of inclination in relation to the micromirror situated in its neutral position;
wherein the angle of inclination is specified in such a way that a second impingement angle of the reflection beam impinging upon the oscillating micromirror varies within a second value range; and
wherein the reflective surface of the micromirror is at least partially covered with a coating, which has a reflection coefficient of at least 0.6 for the first value range, and a reflection coefficient of maximally 0.4 for the second value range.