US 11,940,618 B2
Micromechanical component and method for producing a micromechanical component
Alexander Eberspaecher, Aalen (DE); Frank Schatz, Kornwestheim (DE); Janine Riedrich-Moeller, Leonberg-Warmbronn (DE); Joerg Muchow, Munich (DE); Josip Mihaljevic, Holzgerlingen (DE); Kerrin Doessel, Stuttgart (DE); Ralf Boessendoerfer, Dinkelsbuehl (DE); and Timo Schary, Aichtal-Neuenhaus (DE)
Assigned to ROBERT BOSCH GMBH, Stuttgart (DE)
Appl. No. 17/255,233
Filed by Robert Bosch GmbH, Stuttgart (DE)
PCT Filed Aug. 20, 2019, PCT No. PCT/EP2019/072217
§ 371(c)(1), (2) Date Dec. 22, 2020,
PCT Pub. No. WO2020/052919, PCT Pub. Date Mar. 19, 2020.
Claims priority of application No. 102018215528.3 (DE), filed on Sep. 12, 2018.
Prior Publication US 2021/0271073 A1, Sep. 2, 2021
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); B81B 7/02 (2006.01); B81C 1/00 (2006.01)
CPC G02B 26/0858 (2013.01) [B81B 3/0021 (2013.01); B81B 7/02 (2013.01); B81C 1/00134 (2013.01); B81B 2201/042 (2013.01); B81C 2201/0161 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A micromechanical component, comprising:
a mount;
a displaceable part;
a first serpentine spring and a second serpentine spring which is embodied mirror-symmetrically with respect to the first serpentine spring in terms of a first plane of symmetry, each respective serpentine spring of the first serpentine spring and the second serpentine spring being attached, at a respective outer end of the respective serpentine spring, directly or indirectly to the mount, and being attached at a respective inner end of the respective serpentine spring, directly or indirectly to the displaceable part;
a first actuator device embodied on and/or in the first serpentine spring, and a second actuator device being embodied on and/or in the second serpentine spring, so that by the first actuator device and the second actuator device, periodic deformations, mirror-symmetrical in terms of the first plane of symmetry, of the first serpentine spring and of the second serpentine spring are excitable, with a result that the displaceable part is displaceable with respect to the mount; and
a first torsion spring and a second torsion spring, which each extend along a rotation axis, each respective torsion spring of the first torsion spring and the second torsion spring being attached at an outer end of the respective torsion spring, directly or indirectly to the mount, and being attached at an inner end of the respective torsion spring directly or indirectly to the displaceable part;
wherein the displaceable part is displaceable, at least by the periodic and mirror-symmetrical deformations of the first serpentine spring and of the second serpentine spring, around the rotation axis with respect to the mount, and
wherein inner ends of the first serpentine spring and of the second serpentine spring are attached to a first fastening strut that is on a first side of the rotation axis and proceeds parallel to the rotation axis, and wherein the displaceable part is attached to the first fastening strut.