US 11,940,572 B2
Polarization splitter-rotator having silicon based waveguide with silicon nitride segment
Bing Shen, Sunnyvale, CA (US); Kevin Masuda, Alhambra, CA (US); Brett E. Huff, Keller, TX (US); and Pradeep Srinivasan, Fremont, CA (US)
Assigned to Aeva, Inc., Mountain View, CA (US)
Filed by AEVA, INC., Mountain View, CA (US)
Filed on Jul. 12, 2021, as Appl. No. 17/372,988.
Application 17/372,988 is a continuation of application No. 17/221,694, filed on Apr. 2, 2021, granted, now 11,061,123.
Application 17/221,694 is a continuation of application No. 17/129,061, filed on Dec. 21, 2020, granted, now 10,983,200, issued on Apr. 20, 2021.
Prior Publication US 2022/0196813 A1, Jun. 23, 2022
Int. Cl. G01S 7/499 (2006.01); G01S 17/06 (2006.01); G02B 6/12 (2006.01); G02B 6/122 (2006.01); G02B 6/126 (2006.01); G02B 27/28 (2006.01)
CPC G01S 7/499 (2013.01) [G01S 17/06 (2013.01); G02B 6/1228 (2013.01); G02B 6/126 (2013.01); G02B 27/283 (2013.01); G02B 2006/12138 (2013.01); G02B 2006/1215 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A polarization splitter-rotator (PSR), comprising:
a silicon nitride based waveguide to split and rotate an optical beam, the silicon nitride based waveguide having a first silicon nitride segment comprising:
a first silicon nitride layer; and
a second silicon nitride layer coupled with the first silicon nitride layer, wherein a ratio of a width of the first silicon nitride layer to a width of the second silicon nitride layer at a converging plane is between 30% to 60%.