CPC G01S 7/499 (2013.01) [G01S 17/06 (2013.01); G02B 6/1228 (2013.01); G02B 6/126 (2013.01); G02B 27/283 (2013.01); G02B 2006/12138 (2013.01); G02B 2006/1215 (2013.01)] | 17 Claims |
1. A polarization splitter-rotator (PSR), comprising:
a silicon nitride based waveguide to split and rotate an optical beam, the silicon nitride based waveguide having a first silicon nitride segment comprising:
a first silicon nitride layer; and
a second silicon nitride layer coupled with the first silicon nitride layer, wherein a ratio of a width of the first silicon nitride layer to a width of the second silicon nitride layer at a converging plane is between 30% to 60%.
|