US 11,940,488 B2
Systems and methods for high precision optical characterization of carrier transport properties in semiconductor manufacturing
William W. Chism, II, Austin, TX (US)
Assigned to XCALIPR CORPORATION
Filed by XCalipr Corporation, Dover, DE (US)
Filed on May 31, 2022, as Appl. No. 17/828,284.
Application 17/828,284 is a continuation in part of application No. 17/149,303, filed on Jan. 14, 2021, granted, now 11,402,429.
Application 17/149,303 is a continuation of application No. 15/855,142, filed on Dec. 27, 2017, granted, now 10,921,369, issued on Feb. 16, 2021.
Claims priority of provisional application 62/498,685, filed on Jan. 5, 2017.
Prior Publication US 2022/0291281 A1, Sep. 15, 2022
Int. Cl. G01R 31/28 (2006.01); G01R 31/309 (2006.01)
CPC G01R 31/309 (2013.01) [G01R 31/2831 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A method for evaluating a semiconductor sample, comprising:
establishing a trained neural network that correlates Z-scan PMR data from the sample with at least one electronic transport property of the sample;
acquiring Z-scan PMR data from the sample; and
using the trained neural network to predict at least one electronic transport property of the sample from the acquired Z-scan PMR data.