US 11,940,486 B2
Probe station capable of maintaining stable and accurate contact to device under test
Yi-Kai Chao, Kaohsiung (TW)
Assigned to NANYA TECHNOLOGY CORPORATION, New Taipei (TW)
Filed by NANYA TECHNOLOGY CORPORATION, New Taipei (TW)
Filed on Jun. 1, 2022, as Appl. No. 17/805,027.
Prior Publication US 2023/0393191 A1, Dec. 7, 2023
Int. Cl. G01R 31/28 (2006.01)
CPC G01R 31/2889 (2013.01) [G01R 31/2865 (2013.01); G01R 31/2868 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A probe station, comprising:
a frame defining an accommodation space;
a platform connected with the frame, the platform having an opening communicated with the accommodation space;
a testing equipment at least partially disposed in the accommodation space, the testing equipment comprising:
a main body; and
a load board connected with the main body, the load board being at least partially exposed through the opening and being configured to support a device under test through the opening;
a probe holder disposed on the platform;
at least one probe held by the probe holder, the probe holder being configured to control the probe to contact with the device under test;
a plurality of first buffering pieces connected between the frame and the main body, the first buffering pieces being separated from each other; and
a plurality of second buffering pieces connected between the platform and the main body, the second buffering pieces being separated from each other.