US 11,940,482 B2
Inspection device
Takashi Isa, Kyoto (JP)
Assigned to NIDEC READ CORPORATION, Kyoto (JP)
Appl. No. 17/785,920
Filed by NIDEC READ CORPORATION, Kyoto (JP)
PCT Filed Dec. 1, 2020, PCT No. PCT/JP2020/044609
§ 371(c)(1), (2) Date Jun. 16, 2022,
PCT Pub. No. WO2021/124862, PCT Pub. Date Jun. 24, 2021.
Claims priority of application No. 2019-230178 (JP), filed on Dec. 20, 2019.
Prior Publication US 2023/0024921 A1, Jan. 26, 2023
Int. Cl. G01R 31/28 (2006.01)
CPC G01R 31/2808 (2013.01) [G01R 31/2887 (2013.01); G01R 31/2891 (2013.01); G01R 31/2893 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An inspection device comprising:
an upper mechanism including a table provided with a placement surface of an inspection target;
a lower mechanism configured to rotatably support the upper mechanism; and
a lifting operation unit configured to be supported by the upper mechanism so as to be movable up and down, wherein
the lower mechanism includes:
a rotation drive unit configured to rotate the upper mechanism; and
a push-up force output unit aligned so as to face the lifting operation unit and configured to lift and lower the lifting operation unit,
the lifting operation unit is disposed at a position facing the push-up force output unit when a rotation angle of the upper mechanism with respect to the lower mechanism is a preset setting angle, and
a transmission member with which a tip of the push-up force output unit can contact or separate is provided at a lower end of the lifting operation unit.