US 11,940,466 B2
Ceramic, probe guiding member, probe card, and socket for package inspection
Wataru Yamagishi, Tokyo (JP); Kazumasa Mori, Tokyo (JP); and Shunichi Eto, Tokyo (JP)
Assigned to FERROTEC MATERIAL TECHNOLOGIES CORPORATION, Tokyo (JP)
Appl. No. 16/757,168
Filed by FERROTEC MATERIAL TECHNOLOGIES CORPORATION, Tokyo (JP)
PCT Filed Oct. 19, 2018, PCT No. PCT/JP2018/039052
§ 371(c)(1), (2) Date Apr. 17, 2020,
PCT Pub. No. WO2019/078364, PCT Pub. Date Apr. 25, 2019.
Claims priority of application No. 2017-203052 (JP), filed on Oct. 20, 2017.
Prior Publication US 2020/0241047 A1, Jul. 30, 2020
Int. Cl. G01R 1/073 (2006.01); C04B 35/583 (2006.01); G01R 1/067 (2006.01); G01R 31/28 (2006.01)
CPC G01R 1/07342 (2013.01) [C04B 35/583 (2013.01); G01R 1/06755 (2013.01); G01R 31/2886 (2013.01); C04B 2235/9607 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A ceramic comprising, in mass %:
BN: 20.0 to 45.0%;
SiC: 5.0 to 40.0%; and
ZrO2 and/or Si3N4: 3.0 to 60.0%, and wherein the ceramic has flexural strength of 200 MPa or more.