CPC G01N 29/022 (2013.01) [G01N 29/024 (2013.01); G01N 29/032 (2013.01); G01N 29/036 (2013.01); G01N 29/222 (2013.01); G01N 29/2437 (2013.01); G01N 33/54373 (2013.01); G01N 2291/012 (2013.01); G01N 2291/014 (2013.01); G01N 2291/015 (2013.01); G01N 2291/02466 (2013.01); G01N 2291/0255 (2013.01); G01N 2291/0256 (2013.01); G01N 2291/0421 (2013.01); G01N 2291/0422 (2013.01); G01N 2291/0426 (2013.01); G01N 2291/056 (2013.01); H03H 9/175 (2013.01)] | 20 Claims |
1. A fluidic device comprising:
a base structure comprising: (i) a substrate; (ii) at least one bulk acoustic wave resonator structure supported by the substrate, the at least one bulk acoustic wave resonator structure including a piezoelectric material, a top side electrode arranged over a portion of the piezoelectric material, and a bottom side electrode arranged below at least a portion of the piezoelectric material, wherein a portion of the piezoelectric material is arranged between the top side electrode and the bottom side electrode to form an active region; and (iii) at least one functionalization material arranged over at least a portion of the active region;
a wall structure arranged over at least a portion of the base structure and defining lateral boundaries of a fluidic passage arranged to receive a fluid and containing the active region;
a cover structure arranged over the wall structure defining an upper boundary of the fluidic passage, wherein the cover structure defines at least one first port that is in fluid communication with the fluidic passage, and at least a portion of the at least one first port is registered with the active region to cause the fluid to enter the fluidic passage from above the top side electrode of the bulk acoustic wave resonator structure in a first direction normal to a planar surface of the active region; and
at least one second port that is in fluid communication with the fluidic passage.
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