US 11,940,415 B2
Fluidic device with fluid port orthogonal to functionalized active region
Gernot Fattinger, Sorrento, FL (US); and Rio Rivas, Bend, OR (US)
Assigned to Zomedica Biotechnologies LLC, Ann Arbor, MI (US)
Filed by Qorvo Biotechnologies, LLC, Plymouth, MN (US)
Filed on Oct. 7, 2022, as Appl. No. 17/961,953.
Application 17/961,953 is a division of application No. 16/741,061, filed on Jan. 13, 2020, granted, now 11,486,859.
Application 16/741,061 is a division of application No. 15/341,330, filed on Nov. 2, 2016, granted, now 10,533,972, issued on Jan. 14, 2020.
Claims priority of provisional application 62/249,515, filed on Nov. 2, 2015.
Prior Publication US 2023/0036296 A1, Feb. 2, 2023
Int. Cl. G01N 29/02 (2006.01); G01N 29/024 (2006.01); G01N 29/032 (2006.01); G01N 29/036 (2006.01); G01N 29/22 (2006.01); G01N 29/24 (2006.01); G01N 33/543 (2006.01); H03H 9/17 (2006.01)
CPC G01N 29/022 (2013.01) [G01N 29/024 (2013.01); G01N 29/032 (2013.01); G01N 29/036 (2013.01); G01N 29/222 (2013.01); G01N 29/2437 (2013.01); G01N 33/54373 (2013.01); G01N 2291/012 (2013.01); G01N 2291/014 (2013.01); G01N 2291/015 (2013.01); G01N 2291/02466 (2013.01); G01N 2291/0255 (2013.01); G01N 2291/0256 (2013.01); G01N 2291/0421 (2013.01); G01N 2291/0422 (2013.01); G01N 2291/0426 (2013.01); G01N 2291/056 (2013.01); H03H 9/175 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A fluidic device comprising:
a base structure comprising: (i) a substrate; (ii) at least one bulk acoustic wave resonator structure supported by the substrate, the at least one bulk acoustic wave resonator structure including a piezoelectric material, a top side electrode arranged over a portion of the piezoelectric material, and a bottom side electrode arranged below at least a portion of the piezoelectric material, wherein a portion of the piezoelectric material is arranged between the top side electrode and the bottom side electrode to form an active region; and (iii) at least one functionalization material arranged over at least a portion of the active region;
a wall structure arranged over at least a portion of the base structure and defining lateral boundaries of a fluidic passage arranged to receive a fluid and containing the active region;
a cover structure arranged over the wall structure defining an upper boundary of the fluidic passage, wherein the cover structure defines at least one first port that is in fluid communication with the fluidic passage, and at least a portion of the at least one first port is registered with the active region to cause the fluid to enter the fluidic passage from above the top side electrode of the bulk acoustic wave resonator structure in a first direction normal to a planar surface of the active region; and
at least one second port that is in fluid communication with the fluidic passage.