US 11,940,407 B2
Micro-sensor for detecting chemical species and associated manufacturing method
Bruno Ghyselen, Seyssinet (FR)
Assigned to Soitec, Bernin (FR)
Appl. No. 17/044,205
Filed by Soitec, Bernin (FR)
PCT Filed Mar. 19, 2019, PCT No. PCT/FR2019/050610
§ 371(c)(1), (2) Date Sep. 30, 2020,
PCT Pub. No. WO2019/186027, PCT Pub. Date Oct. 3, 2019.
Claims priority of application No. 1852783 (FR), filed on Mar. 30, 2018.
Prior Publication US 2021/0132002 A1, May 6, 2021
Int. Cl. G01N 27/414 (2006.01); B01L 3/00 (2006.01); H01L 21/306 (2006.01); H01L 21/762 (2006.01); H01L 29/16 (2006.01); H01L 29/161 (2006.01); H01L 29/20 (2006.01)
CPC G01N 27/4148 (2013.01) [B01L 3/502715 (2013.01); H01L 21/30604 (2013.01); H01L 21/76254 (2013.01); B01L 2200/12 (2013.01); H01L 29/16 (2013.01); H01L 29/161 (2013.01); H01L 29/20 (2013.01); H01L 29/2003 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A microsensor for detecting ions in a fluid, comprising:
a field-effect transistor having a source, a drain, an active region between the source and the drain, and a gate positioned above the active region;
an active layer in which the active region is formed;
a dielectric layer positioned beneath the active layer; and
a support substrate positioned beneath the dielectric layer and comprising at least one buried cavity, located plumb with the gate of the field-effect transistor to receive the fluid, the at least one buried cavity comprising a constriction in a vicinity of the dielectric layer and a flared portion in a deeper zone of the support substrate.