| CPC G01N 23/223 (2013.01) [G01B 9/04 (2013.01); G01N 2223/076 (2013.01); G01N 2223/1016 (2013.01); G01N 2223/32 (2013.01); G01N 2223/402 (2013.01); G01N 2223/6116 (2013.01)] | 10 Claims |
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1. A radiation detection device comprising:
a sample holding unit;
an optical microscope configured to observe a sample held by the sample holding unit;
an irradiation unit that irradiates the sample observed by the optical microscope with radiation;
a detection unit that detects radiation generated from the sample irradiated with the radiation;
a focal position adjustment unit that adjusts a focal position of the optical microscope;
a driving unit that drives the sample holding unit;
a processor; and
a memory, wherein the processor is operable to:
adjust a relationship between the focal position and a position of the sample such that the optical microscope is focused on one portion of the sample using at least one of the focal position adjustment unit and the driving unit;
change a position, on which the optical microscope is to be focused, on the sample using the driving unit;
calculate a distance from a predetermined base point to the surface of the sample at the changed position on the sample according to the adjusted focal position;
create a partial image captured by the optical microscope at the changed position on the sample in a state in which adjustment of the relationship is performed for focusing; and
create a sample image including information in which the calculated distance is associated with each of a plurality of portions of the sample by combining a plurality of created partial images.
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