US 11,940,396 B2
Method for improving an EBSD/TKD map
Daniel Radu Goran, Berlin (DE); and Thomas Schwager, Berlin (DE)
Assigned to Bruker Nano GmbH, Berlin (DE)
Appl. No. 17/608,635
Filed by BRUKER NANO GMBH, Berlin (DE)
PCT Filed May 5, 2020, PCT No. PCT/EP2020/062373
§ 371(c)(1), (2) Date Nov. 3, 2021,
PCT Pub. No. WO2020/225234, PCT Pub. Date Nov. 12, 2020.
Claims priority of application No. 19173309 (EP), filed on May 8, 2019.
Prior Publication US 2022/0221412 A1, Jul. 14, 2022
Int. Cl. G01N 23/20008 (2018.01); G01N 23/20 (2018.01); G01N 23/20025 (2018.01); G01N 23/20058 (2018.01); G01N 23/20091 (2018.01); G01N 23/203 (2006.01); G01N 23/205 (2018.01); G01N 23/2055 (2018.01); G01N 23/207 (2018.01); G01N 23/2206 (2018.01); G01N 23/2252 (2018.01); G01N 23/2254 (2018.01); G06V 10/48 (2022.01)
CPC G01N 23/2055 (2013.01) [G01N 23/20008 (2013.01); G01N 23/20025 (2013.01); G01N 23/20058 (2013.01); G01N 23/20083 (2013.01); G01N 23/20091 (2013.01); G01N 23/203 (2013.01); G01N 23/205 (2013.01); G01N 23/207 (2013.01); G01N 23/2206 (2013.01); G01N 23/2252 (2013.01); G01N 23/2254 (2013.01); G06V 10/48 (2022.01); G01N 2223/053 (2013.01); G01N 2223/056 (2013.01); G01N 2223/0565 (2013.01); G01N 2223/0566 (2013.01); G01N 2223/071 (2013.01); G01N 2223/079 (2013.01); G01N 2223/08 (2013.01); G01N 2223/102 (2013.01); G01N 2223/401 (2013.01); G01N 2223/605 (2013.01); G01N 2223/607 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A method for improving an EBSD/TKD map comprising a plurality of data points, each data point being assigned to a corresponding grid point of a sample grid and representing crystal information based on a Kikuchi pattern detected for the grid point, the method comprising:
determining a defective data point of the EBSD/TKD map and a plurality of non-defective neighboring data points of the defective data point;
comparing Kikuchi bands of a Kikuchi pattern detected for a grid point corresponding to the defective data point with at least one simulated Kikuchi pattern corresponding to crystal information of the plurality of non-defective neighboring data points; and
assigning crystal information of one of the plurality of non-defective neighboring data points to the defective data point based on the comparing.