US 11,940,394 B2
Inspection apparatus and inspection method
Takeo Tsukamoto, Niigata (JP)
Assigned to CANON ANELVA CORPORATION, Kawasaki (JP)
Filed by Canon Anelva Corporation, Kawasaki (JP)
Filed on Jul. 11, 2023, as Appl. No. 18/350,221.
Application 18/350,221 is a continuation of application No. PCT/JP2022/043905, filed on Nov. 29, 2022.
Claims priority of application No. 2022-013653 (JP), filed on Jan. 31, 2022.
Prior Publication US 2023/0349845 A1, Nov. 2, 2023
Int. Cl. G01N 23/2206 (2018.01); G01N 23/04 (2018.01); G01N 23/083 (2018.01); G01N 23/18 (2018.01); G01N 23/20008 (2018.01); G01N 23/223 (2006.01); G21K 7/00 (2006.01); H01J 35/18 (2006.01)
CPC G01N 23/18 (2013.01) [G01N 23/04 (2013.01); G01N 23/083 (2013.01); G01N 23/20008 (2013.01); G01N 23/2206 (2013.01); G01N 23/223 (2013.01); G21K 7/00 (2013.01); H01J 35/186 (2019.05); G01N 2223/04 (2013.01); G01N 2223/052 (2013.01); G01N 2223/071 (2013.01); G01N 2223/076 (2013.01); G01N 2223/1016 (2013.01); G01N 2223/20 (2013.01); G01N 2223/204 (2013.01); G01N 2223/32 (2013.01); G01N 2223/643 (2013.01); G01N 2223/652 (2013.01)] 22 Claims
OG exemplary drawing
 
1. An inspection apparatus for inspecting an inspection target object, comprising:
an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection target object; and
a plurality of X-ray detectors,
wherein each of the plurality of X-ray detectors detects X-rays emitted from a foreign substance existing on an inspection target surface of the inspection target object irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface,
wherein a distance between an inspection plane of the inspection target object and the X-ray generation portion is not larger than 5 mm.