US 11,940,378 B2
Spectrometer system and method for testing of same
Felix Kerstan, Jena (DE); and Juergen Gobel, Jena (DE)
Assigned to CARL ZEISS SPECTROSCOPY GMBH, Jena (DE)
Appl. No. 17/432,133
Filed by CARL ZEISS SPECTROSCOPY GMBH, Jena (DE)
PCT Filed Dec. 18, 2019, PCT No. PCT/EP2019/086039
§ 371(c)(1), (2) Date Aug. 19, 2021,
PCT Pub. No. WO2020/169237, PCT Pub. Date Aug. 27, 2020.
Claims priority of application No. 10 2019 104 066.3 (DE), filed on Feb. 19, 2019.
Prior Publication US 2022/0187196 A1, Jun. 16, 2022
Int. Cl. G01N 21/27 (2006.01)
CPC G01N 21/276 (2013.01) [G01N 21/278 (2013.01)] 28 Claims
OG exemplary drawing
 
1. A method for testing a spectrometer system, wherein the spectrometer system comprises a housing provided with a window, an illumination source, a spectrometer and at least one standard for internal recalibration being arranged in said housing, and wherein the method comprises the following steps:
identifying specific absorption bands of a fill gas, present in the housing, in a reference spectrum recorded by the spectrometer using the standard following the calibration of the spectrometer system, with a wavelength characterizing the respective identified specific absorption band being measured in each case such that measurement values are obtained for the wavelengths of the identified specific absorption bands;
recording a test spectrum with the spectrometer using the standard;
identifying the specific absorption bands of the fill gas in the test spectrum, with a wavelength characterizing the respective identified specific absorption band being measured in each case, such that measurement values are obtained for the wavelengths of the identified specific absorption bands; and
testing whether the measurement values of the wavelengths of the specific absorption bands of the fill gas identified in the test spectrum deviate by no more than a specified measure from the measurement values of the wavelengths of the specific absorption bands of the fill gas identified in the reference spectrum, characterized in that the fill gas comprises suspended water in the form of water vapor such that the specific absorption bands of water vapor are identified in the reference spectrum and in the test spectrum.