US 11,940,377 B2
Device and method for detecting a surface defect using interference between polarized lights
Lu Chen, Shenzhen (CN); Youwei Huang, Beijing (CN); Gaozeng Cui, Beijing (CN); and Timmy Wang, Beijing (CN)
Assigned to Skyverse Technology Co., Ltd., Shenzhen (CN)
Appl. No. 17/257,962
Filed by SKYVERSE TECHNOLOGY CO., LTD., Guangdong (CN)
PCT Filed Jul. 8, 2019, PCT No. PCT/CN2019/094976
§ 371(c)(1), (2) Date Jan. 5, 2021,
PCT Pub. No. WO2020/007370, PCT Pub. Date Jan. 9, 2020.
Claims priority of application No. 201810737921.4 (CN), filed on Jul. 6, 2018.
Prior Publication US 2021/0270725 A1, Sep. 2, 2021
Int. Cl. G01N 21/21 (2006.01)
CPC G01N 21/21 (2013.01) 23 Claims
OG exemplary drawing
 
1. A detection device, comprising:
a light generator coupled to a light adjustment module wherein the light generator generates a first polarized light, wherein the first polarized light is reflected by a surface to be detected of a component to form a first echo light, the first echo light forming a component of a signal light; and
a first light detector that acquires a first light intensity distribution information of the signal light, the first light detector including two or more polarization detectors with the polarization detection directions of two different ones of the polarization detectors being different, or the two or more polarization detectors including a non-polarization detector and at least one polarization detector.