US 11,940,375 B2
Fiber-optic photoacoustic sensing probe capable of resisting interference from ambient noise, and sensing system
Fengxiang Ma, Anhui (CN); Ke Chen, Liaoning (CN); Yue Zhao, Anhui (CN); Feng Zhu, Anhui (CN); Min Guo, Liaoning (CN); Yu Tian, Anhui (CN); Xiaofang Yuan, Anhui (CN); Yabin Ma, Anhui (CN); and Chen Hang, Anhui (CN)
Assigned to STATE GRID ANHUI ELECTRIC POWER RESEARCH INSTITUTE, Hefei (CN); and Dalian University of Technology, Dalian (CN)
Filed by STATE GRID ANHUI ELECTRIC POWER RESEARCH INSTITUTE, Anhui (CN); and Dalian University of Technology, Liaoning (CN)
Filed on Nov. 26, 2021, as Appl. No. 17/535,978.
Application 17/535,978 is a continuation of application No. PCT/CN2021/121019, filed on Sep. 27, 2021.
Claims priority of application No. 202011424469.X (CN), filed on Dec. 8, 2020.
Prior Publication US 2022/0178816 A1, Jun. 9, 2022
Int. Cl. G01N 33/00 (2006.01); G01N 21/17 (2006.01)
CPC G01N 21/1702 (2013.01) [G01N 33/0027 (2013.01); G01N 2021/1704 (2013.01); G01N 2201/06113 (2013.01); G01N 2201/08 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A fiber-optic photoacoustic sensing probe capable of resisting interference from ambient noise, comprising a fiber-optic collimator (9), a single-mode optical fiber (10), a photoacoustic microcavity (11), a miniature air chamber (12), a diffusion micropore (13), a sound-sensitive diaphragm (14), and a sound-insulated housing (15), wherein the miniature air chamber (12) is provided inside the sound-insulated housing (15), the miniature air chamber (12) is cylindrical, and a plurality of diffusion micropores (13) communicating with the outside are provided along a diameter direction of the miniature air chamber (12); the sound-sensitive diaphragm (14) is installed inside the miniature air chamber (12), and comprises a plurality of gaps (141) that constitute a cross-shaped beam structure at a central position of the sound-sensitive diaphragm (14); the photoacoustic microcavity (11) is deployed inside the sound-insulated housing (15) along a direction perpendicular to the miniature air chamber (12), one end of the photoacoustic microcavity (11) is connected to the outside, and the other end of the photoacoustic microcavity (11) is connected to the miniature air chamber (12); the fiber-optic collimator (9) is sealed and installed on the end, connected to the outside, of the photoacoustic microcavity (11); the single-mode optical fiber (10) is connected to the miniature air chamber (12) along a horizontal center line of the sound-insulated housing (15); and a center of the sound-sensitive diaphragm (14) and an end face of the single-mode optical fiber (10) constitute a fiber-optic Fabry-Perot interferometer.