US 11,940,345 B2
Micromechanical component for a capacitive pressure sensor device
Thomas Friedrich, Moessingen-Oeschingen (DE); Christoph Hermes, Kirchentellinsfurt (DE); Hans Artmann, Boeblingen-Dagersheim (DE); Heribert Weber, Nuertingen (DE); Peter Schmollngruber, Aidlingen (DE); and Volkmar Senz, Metzingen (DE)
Assigned to ROBERT BOSCH GMBH, Stuttgart (DE)
Filed by Robert Bosch GmbH, Stuttgart (DE)
Filed on Dec. 19, 2019, as Appl. No. 16/721,333.
Claims priority of application No. 102018222712.8 (DE), filed on Dec. 21, 2018.
Prior Publication US 2020/0200631 A1, Jun. 25, 2020
Int. Cl. G01L 9/00 (2006.01); B81B 3/00 (2006.01); G01L 1/14 (2006.01); G01L 9/12 (2006.01)
CPC G01L 9/0073 (2013.01) [B81B 3/0018 (2013.01); G01L 1/148 (2013.01); G01L 9/12 (2013.01); B81B 2201/0264 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A micromechanical component for a capacitive pressure sensor device, the micromechanical component comprising:
a substrate;
a frame structure that frames a partial surface of the substrate and/or of at least one intermediate layer on the substrate;
a membrane that is tensioned by the frame structure in such a way that a self-supporting region of the membrane extends over the framed partial surface, with an internal volume between the membrane and the framed partial surface;
at least one first connector protruding from a radially interior region of the membrane towards the framed partial surface;
a counter-electrode in the internal volume and attached to the membrane via the at least one first connector;
a measurement electrode that is situated on the framed partial surface;
a reference counter-electrode;
a reference measurement electrode that is situated on the framed partial surface and is electrically insulated from the measurement electrode; and
a second connector protruding from a radially exterior region of the membrane towards the substrate;
wherein:
the internal volume is enclosed by the frame structure and is air-tightly sealed with a reference pressure therein;
the self-supporting region of the membrane is deformable by a physical pressure that is applied on an external side of the self-supporting region, oriented away from the internal volume, when the physical pressure is unequal to the reference pressure;
the reference counter-electrode is connected to the membrane by attachment of a radially exterior half of the reference counter-electrode to the second connector; and
a radially interior half of the reference counter-electrode is free from the membrane.