US 11,940,326 B2
Spectroscopic analysis device, optical system, and method
Kodai Murayama, Tokyo (JP); Toshiyuki Saruya, Tokyo (JP); Fumie Watanabe, Tokyo (JP); and Risa Hara, Tokyo (JP)
Assigned to Yokogawa Electric Corporation, Tokyo (JP)
Filed by YOKOGAWA ELECTRIC CORPORATION, Tokyo (JP)
Filed on Aug. 19, 2021, as Appl. No. 17/406,653.
Claims priority of application No. 2020-142851 (JP), filed on Aug. 26, 2020.
Prior Publication US 2022/0065697 A1, Mar. 3, 2022
Int. Cl. G01J 3/42 (2006.01); G01J 3/02 (2006.01); G01N 21/31 (2006.01); G01N 21/359 (2014.01)
CPC G01J 3/42 (2013.01) [G01J 3/0218 (2013.01); G01N 21/359 (2013.01); G01N 2021/3155 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A spectroscopic analysis device, comprising:
a film that contacts a sample subject to spectroscopic analysis;
a first irradiator that irradiates a first irradiation light having transition energy to decompose attached material attached to a boundary surface of the film; and
an optical waveguide that transmits the first irradiation light irradiated from the first irradiator, wherein
a first evanescent wave, based on the first irradiation light, is generated on a front surface of the optical waveguide, and is then projected on an attached region of the attached material,
the spectroscopic analysis device further comprises:
a second irradiator that irradiates a second irradiation light on the film, wherein the second irradiation light generates a second evanescent wave that projects onto a region of the sample;
a detector that detects a measured light based on the second irradiation light irradiated by the second irradiator, wherein the second measured light comprises information of an absorption spectrum of the sample;
a prism that allows the second irradiation light and the measured light to pass through; and
a filter disposed between the prism and the optical waveguide, wherein the filter has higher transmissivity with respect to the second irradiation light than transmissivity with respect to the first irradiation light.