US 11,940,323 B2
Electromagnetic wave module and electromagnetic wave camera system using the same
Takeaki Itsuji, Kanagawa (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Nov. 19, 2021, as Appl. No. 17/531,606.
Claims priority of application No. 2020-198281 (JP), filed on Nov. 30, 2020.
Prior Publication US 2022/0170785 A1, Jun. 2, 2022
Int. Cl. G01J 1/44 (2006.01); G01J 1/02 (2006.01); G01J 1/04 (2006.01); H01L 31/0232 (2014.01); H01L 31/024 (2014.01); H01L 33/58 (2010.01); H01L 33/64 (2010.01)
CPC G01J 1/44 (2013.01) [G01J 1/0252 (2013.01); G01J 1/0411 (2013.01); G01J 1/0422 (2013.01); H01L 31/02327 (2013.01); H01L 31/024 (2013.01); H01L 33/58 (2013.01); H01L 33/644 (2013.01); G01J 2001/4466 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An electromagnetic wave module comprising a chip and a lens unit,
wherein the chip has a first face, a second face opposed to the first face, and a third face connecting the first face and the second face,
wherein the chip at least includes an antenna electrode disposed on the first face, a reference portion disposed on the second face and configured to determine a reference potential, and a semiconductor portion disposed between the antenna electrode and the reference portion and configured to perform gain action or rectification action on electromagnetic waves,
wherein the lens unit has a curved face forming a lens, a fourth face opposed to the curved face, and a recessed portion encompassed in an outer edge of the curved face on a projected plane in an optical axis of the lens,
wherein the recessed portion has a fifth face disposed at a position closer to the curved face than the fourth face, and a sixth face connecting the fifth face and the fourth face, and
wherein at least a part of the sixth face of the recessed portion is in contact with at least a part of the third face of the chip.