US 11,940,275 B2
Vibrator device, electronic apparatus, and vehicle
Seiichiro Ogura, Minowa (JP); Keiichi Yamaguchi, Ina (JP); and Ryuta Nishizawa, Nagano (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on Apr. 12, 2022, as Appl. No. 17/718,418.
Application 17/718,418 is a continuation of application No. 16/941,655, filed on Jul. 29, 2020, granted, now 11,326,882.
Claims priority of application No. 2019-139663 (JP), filed on Jul. 30, 2019.
Prior Publication US 2022/0236057 A1, Jul. 28, 2022
Int. Cl. G01C 19/5642 (2012.01); B60R 16/023 (2006.01); G01C 19/56 (2012.01); G01C 19/5607 (2012.01); G01C 19/5656 (2012.01); G01P 15/18 (2013.01)
CPC G01C 19/5642 (2013.01) [B60R 16/023 (2013.01); G01C 19/56 (2013.01); G01C 19/5607 (2013.01); G01C 19/5656 (2013.01); G01P 15/18 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A vibrator device comprising:
a support substrate including a support base and a support part connected to the support base via a beam, the support base, the beam, and the support part being a monolithic structure, only the support part being connected to a package base to support an entirety of the support substrate; and
a vibrator element including an element base and a drive arm, the element base being connected to the support base, the drive arm having first and second surfaces outwardly opposite to each other, the first surface facing the support substrate,
wherein the drive arm includes:
a drive constant-potential electrode arranged on the first surface; and
a drive signal electrode arranged on only the second surface.