CPC F04B 43/046 (2013.01) [F04B 41/06 (2013.01); F04B 49/06 (2013.01); F04B 23/02 (2013.01)] | 14 Claims |
1. A pump device comprising:
a first piezoelectric pump;
a second piezoelectric pump connected in series with the first piezoelectric pump on a downstream side of the first piezoelectric pump;
a driver configured to supply AC input power to each of the first piezoelectric pump and the second piezoelectric pump;
a controller configured to control an input power of each of the first piezoelectric pump and the second piezoelectric pump; and
a power supply configured to supply power to the driver,
wherein the controller is configured to control the input power of the second piezoelectric pump to be larger than the input power of the first piezoelectric pump based on a negative pressure in a container that is connected to an upstream side of the first piezoelectric pump.
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