US 11,939,969 B2
Pump
Masaaki Fujisaki, Kyoto (JP); and Nobuhira Tanaka, Kyoto (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Kyoto (JP)
Filed on Dec. 28, 2022, as Appl. No. 18/147,188.
Application 18/147,188 is a division of application No. 17/036,011, filed on Sep. 29, 2020, granted, now 11,572,872.
Application 17/036,011 is a continuation of application No. PCT/JP2019/012658, filed on Mar. 26, 2019.
Claims priority of application No. 2018-104273 (JP), filed on May 31, 2018; application No. 2018-119430 (JP), filed on Jun. 25, 2018; and application No. 2018-119431 (JP), filed on Jun. 25, 2018.
Prior Publication US 2023/0193892 A1, Jun. 22, 2023
Int. Cl. F16K 7/17 (2006.01); F04B 43/04 (2006.01); F04B 49/22 (2006.01); F16K 15/14 (2006.01); H10N 30/20 (2023.01); F04B 43/14 (2006.01); F16K 31/02 (2006.01)
CPC F04B 43/04 (2013.01) [F04B 43/046 (2013.01); F04B 49/22 (2013.01); F16K 7/17 (2013.01); F16K 15/14 (2013.01); H10N 30/2047 (2023.02); F04B 43/14 (2013.01); F16K 31/02 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A pump comprising:
a plate-shaped member including:
a vibrating plate having a piezoelectric element disposed on one principal surface,
a support plate, and
a plurality of support members connecting the vibrating plate and the support plate and supporting the vibrating plate so that the vibrating plate is configured to vibrate in a principal surface direction, and including:
a first vent hole between the plurality of support members;
a flow path forming member disposed so as to face the plate-shaped member and having a second vent hole in a portion facing the plate-shaped member;
a pump chamber provided so as to be surrounded by the plate-shaped member, the flow path forming member, and a side wall member connected to the plate-shaped member and the flow path forming member, and having a central space communicating with the second vent hole and an outer edge space communicating with the first vent hole; and
a first film valve disposed in the pump chamber, wherein
the first film valve is in contact with the vibrating plate and the flow path forming member when a pressure in the central space is lower than a pressure in the outer edge space.