US 11,939,695 B2
Quartz glass crucible, manufacturing method of silicon single crystal using the same, and infrared transmissivity measurement method and manufacturing method of quartz glass crucible
Ken Kitahara, Akita (JP); Masanori Fukui, Akita (JP); Hiroshi Kishi, Akita (JP); Tomokazu Katano, Tokyo (JP); and Eriko Kitahara, Akita (JP)
Assigned to SUMCO CORPORATION, Tokyo (JP)
Appl. No. 17/413,929
Filed by SUMCO CORPORATION, Tokyo (JP)
PCT Filed Dec. 16, 2019, PCT No. PCT/JP2019/049120
§ 371(c)(1), (2) Date Jun. 14, 2021,
PCT Pub. No. WO2020/137648, PCT Pub. Date Jul. 2, 2020.
Claims priority of application No. 2018-244361 (JP), filed on Dec. 27, 2018; and application No. 2018-244362 (JP), filed on Dec. 27, 2018.
Prior Publication US 2022/0090291 A1, Mar. 24, 2022
Int. Cl. C30B 15/10 (2006.01); C03B 20/00 (2006.01); C03C 19/00 (2006.01); C30B 29/06 (2006.01); F27B 14/10 (2006.01); G01N 21/3563 (2014.01); G01N 33/38 (2006.01); C03B 19/09 (2006.01)
CPC C30B 15/10 (2013.01) [C03B 20/00 (2013.01); C03C 19/00 (2013.01); C30B 29/06 (2013.01); F27B 14/10 (2013.01); G01N 21/3563 (2013.01); G01N 33/386 (2013.01); C03B 19/095 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A quartz glass crucible comprising:
a cylindrical side wall portion;
a bottom portion; and
a corner portion connecting the side wall portion and the bottom portion to each other;
wherein the cylindrical side wall portion, the bottom portion, and the corner portion are constituted by:
a transparent layer made of quartz glass that does not contain bubbles;
a bubble layer formed outside the transparent layer and made of quartz glass containing bubbles; and
a semi-molten layer formed outside the bubble layer and made of raw material silica powder solidified in a semi-molten state,
wherein the transparent layer and the bubble layer in the corner portion constitute a first laminate having a first infrared transmissivity which is 25 to 51% in a thickness direction,
the transparent layer and the bubble layer in the side wall portion constitute a second laminate having a second infrared transmissivity which is 46 to 84% in a thickness direction and which is higher than the first infrared transmissivity, and
the transparent layer and the bubble layer in the bottom portion constitute a third laminate having a third infrared transmissivity which is 36 to 70% in a thickness direction and which is higher than the first infrared transmissivity, and
wherein the bubble layer in the side wall portion has a thickness which is greater than a thickness of the transparent layer in the side wall portion, and
the bubble layer in the corner portion has a thickness which is greater than the thickness of transparent layer in the side wall portion.