US 11,939,670 B2
Low temperature methods for depositing inorganic particles on a metal substrate and articles produced by the same
Hoon Kim, Horseheads, NY (US); and Charles Andrew Paulson, Painted Post, NY (US)
Assigned to Corning Incorporated, Corning, NY (US)
Appl. No. 17/279,434
Filed by CORNING INCORPORATED, Corning, NY (US)
PCT Filed Sep. 20, 2019, PCT No. PCT/US2019/052139
§ 371(c)(1), (2) Date Mar. 24, 2021,
PCT Pub. No. WO2020/068579, PCT Pub. Date Apr. 2, 2020.
Claims priority of provisional application 62/738,622, filed on Sep. 28, 2018.
Prior Publication US 2021/0404057 A1, Dec. 30, 2021
Int. Cl. C23C 16/36 (2006.01); C23C 16/46 (2006.01); C23C 16/52 (2006.01); B28B 3/26 (2006.01); C22C 38/02 (2006.01); C22C 38/04 (2006.01); C22C 38/42 (2006.01); C22C 38/44 (2006.01); C22C 38/46 (2006.01); C22C 38/52 (2006.01)
CPC C23C 16/36 (2013.01) [C23C 16/46 (2013.01); C23C 16/52 (2013.01); B28B 3/269 (2013.01); C22C 38/02 (2013.01); C22C 38/04 (2013.01); C22C 38/42 (2013.01); C22C 38/44 (2013.01); C22C 38/46 (2013.01); C22C 38/52 (2013.01)] 19 Claims
 
1. A method for depositing an inorganic material onto a metal substrate, the method comprising:
depositing inorganic particles comprising titanium carbonitride via a chemical vapor deposition process over a surface of the metal substrate at a deposition temperature of 900 degrees C. or less,
wherein the chemical vapor deposition process is supplied by two or more source gases that react to form the inorganic particles,
wherein at least one of the source gases comprises a titanium source gas and wherein a source of carbon and nitrogen supplies at least another of the source gases and is selected from the following:
(a) a single source gas, the single source gas comprising a carbon and nitrogen source gas with a heat of formation energy that is less than 65.9 kilojoules per mole,
(b) two source gases, the two source gases comprising a carbon source gas comprising a gas molecule having a carbon-nitrogen single bond and a nitrogen source gas, and
(c) a combination of (a) and (b);
wherein the two or more source gases are supplied along with an aluminum-containing metalorganic reducing agent; and
wherein the titanium source gas is a metalorganic compound.