CPC C23C 14/3414 (2013.01) [B22F 3/15 (2013.01); B22F 3/18 (2013.01); C22C 27/04 (2013.01)] | 6 Claims |
1. A tungsten sputtering target, wherein a purity of tungsten is 5 N (99.999% by weight) or more, and an impurity of carbon and an impurity of oxygen contained in tungsten are 50 ppm by weight or less, respectively, and an average grain size of tungsten crystal is more than 347 μm.
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