US 11,939,658 B2
Deposition mask, deposition mask apparatus, deposition apparatus, and manufacturing method for organic device
Isao Miyatani, Tokyo (JP); Chikao Ikenaga, Tokyo (JP); Yoko Nakamura, Tokyo (JP); and Isao Inoue, Tokyo (JP)
Assigned to Dai Nippon Printing Co., Ltd., Tokyo (JP)
Filed by Dai Nippon Printing Co., Ltd., Tokyo (JP)
Filed on Apr. 6, 2022, as Appl. No. 17/658,101.
Claims priority of application No. 2021-066651 (JP), filed on Apr. 9, 2021; and application No. 2022-052480 (JP), filed on Mar. 28, 2022.
Prior Publication US 2022/0325397 A1, Oct. 13, 2022
Int. Cl. C23C 14/04 (2006.01)
CPC C23C 14/042 (2013.01) 17 Claims
OG exemplary drawing
 
1. A deposition mask comprising:
a first surface;
a second surface that is located opposite the first surface; and
two or more through-holes that extend from the first surface to the second surface,
wherein each of the through-holes includes a first recess that is located at the first surface, a second recess that is located at the second surface and that is in communication with the first recess, and a ridge line that is connected to a wall surface of the first recess and a wall surface of the second recess and that extends inward from the wall surface of the first recess and the wall surface of the second recess in the through-hole,
wherein the ridge line is closer to the first surface than the second surface,
wherein the deposition mask has a first mask region having a first surface remaining ratio that represents a remaining area ratio of the second surface and a second mask region having a second surface remaining ratio that represents a remaining area ratio of the second surface and that is higher than the first surface remaining ratio, and
wherein when a first direction and a second direction are defined in a plan view, parts of the first mask region are located on both sides of the second mask region in the first direction, and another part of the first mask region is located on at least one side of the second mask region in the second direction.