US 11,939,214 B2
Method for manufacturing a device comprising a membrane extending over a cavity
Bruno Ghyselen, Seyssinet (FR)
Assigned to Soitec, Bernin (FR)
Appl. No. 17/416,395
Filed by Soitec, Bernin (FR)
PCT Filed Dec. 12, 2019, PCT No. PCT/FR2019/053039
§ 371(c)(1), (2) Date Jun. 18, 2021,
PCT Pub. No. WO2020/128245, PCT Pub. Date Jun. 25, 2020.
Claims priority of application No. 1873602 (FR), filed on Dec. 20, 2018.
Prior Publication US 2021/0387853 A1, Dec. 16, 2021
Int. Cl. B81C 1/00 (2006.01)
CPC B81C 1/00158 (2013.01) [B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of fabricating a device including a membrane overhanging a useful cavity, the method comprising:
providing a generic structure including a superficial layer extending in a main plane and arranged on a first side of a carrier substrate, the carrier substrate including elementary cavities opening under the superficial layer and partitions delimiting each elementary cavity, the partition having upper surfaces that form all or some of the first side of the carrier substrate;
defining a group of adjacent elementary cavities, such that a contour of the group of adjacent elementary cavities corresponds, in the main plane, to a contour of the useful cavity; and
removing the partitions located inside the contour of the group of adjacent elementary cavities, to form the useful cavity, and to free up the superficial layer arranged above the useful cavity and making up the membrane.
 
14. A method of fabricating a MEMS device, comprising:
providing a structure including a planar layer on a surface of a carrier substrate, the surface of the carrier substrate having elementary cavities therein located under the planar layer and partitions delimiting each elementary cavity, the partitions having upper surfaces that form all or a portion of the surface of the carrier substrate;
forming at least one aperture through the planar layer; and
removing some of the partitions located inside a contour of a group of adjacent elementary cavities and forming a useful cavity without removing at least some of the partitions located outside the contour, and freeing a portion of the planar layer suspended over the useful cavity, the portion of the planar layer defining a membrane of the MEMS device.