CPC B41J 2/14233 (2013.01) [H10N 30/10516 (2023.02); B41J 2002/14258 (2013.01); H10N 30/078 (2023.02)] | 20 Claims |
1. A piezoelectric element in which a first electrode, a seed layer, a piezoelectric layer, and a second electrode are laminated on a substrate, wherein the seed layer is a composite oxide containing at least Pb, Bi, Fe, and Ti, wherein the seed layer is a composite oxide containing at least Pb, Bi, Fe, and Ti, wherein the composite oxide included in the seed layer is represented by PbxBi(a−x)FeyTi(b−y)Oz, where, a>x and b>y, and wherein when the piezoelectric layer is analyzed from a lamination direction of the piezoelectric layer by an X-ray diffraction method, a peak intensity of a (100) plane is higher than a peak intensity of a (110) plane in an X-ray diffraction pattern.
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