US 11,938,730 B2
Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
Kazuya Kitada, Matsumoto (JP)
Assigned to Seiko Epson Corporation, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Sep. 27, 2021, as Appl. No. 17/448,920.
Claims priority of application No. 2020-163462 (JP), filed on Sep. 29, 2020.
Prior Publication US 2022/0097372 A1, Mar. 31, 2022
Int. Cl. B41J 2/14 (2006.01); H10N 30/00 (2023.01); H10N 30/078 (2023.01)
CPC B41J 2/14233 (2013.01) [H10N 30/10516 (2023.02); B41J 2002/14258 (2013.01); H10N 30/078 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A piezoelectric element in which a first electrode, a seed layer, a piezoelectric layer, and a second electrode are laminated on a substrate, wherein the seed layer is a composite oxide containing at least Pb, Bi, Fe, and Ti, wherein the seed layer is a composite oxide containing at least Pb, Bi, Fe, and Ti, wherein the composite oxide included in the seed layer is represented by PbxBi(a−x)FeyTi(b−y)Oz, where, a>x and b>y, and wherein when the piezoelectric layer is analyzed from a lamination direction of the piezoelectric layer by an X-ray diffraction method, a peak intensity of a (100) plane is higher than a peak intensity of a (110) plane in an X-ray diffraction pattern.