US 11,938,570 B2
Laser processing apparatus
Keiji Nomaru, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Sep. 18, 2020, as Appl. No. 17/024,871.
Claims priority of application No. 2019-177344 (JP), filed on Sep. 27, 2019.
Prior Publication US 2021/0094128 A1, Apr. 1, 2021
Int. Cl. B23K 26/53 (2014.01); B23B 31/30 (2006.01); B23K 26/00 (2014.01); B23K 26/03 (2006.01); B23K 26/04 (2014.01); B23K 26/06 (2014.01); B23K 26/064 (2014.01); B23K 26/067 (2006.01); B23K 26/08 (2014.01); B23K 26/38 (2014.01); B23K 26/402 (2014.01); B23K 37/04 (2006.01); B23K 101/40 (2006.01)
CPC B23K 26/53 (2015.10) [B23B 31/307 (2013.01); B23K 26/0006 (2013.01); B23K 26/032 (2013.01); B23K 26/04 (2013.01); B23K 26/064 (2015.10); B23K 26/0648 (2013.01); B23K 26/067 (2013.01); B23K 26/0853 (2013.01); B23K 26/0876 (2013.01); B23K 26/38 (2013.01); B23K 26/402 (2013.01); B23K 37/0408 (2013.01); B23K 2101/40 (2018.08)] 5 Claims
OG exemplary drawing
 
1. A laser processing apparatus comprising:
a chuck table that holds a workpiece;
laser beam applying unit that applies a laser beam to the workpiece held by the chuck table to process the workpiece;
an X-axis feeding mechanism that performs relative processing feeding of the chuck table and the laser beam applying unit in an X-axis direction;
a Y-axis feeding mechanism that performs relative processing feeding of the chuck table and the laser beam applying unit in a Y-axis direction orthogonal to the X-axis direction; and
a control unit,
wherein the laser beam applying unit includes
a laser oscillator that oscillates laser,
a condenser that condenses the laser beam emitted from the laser oscillator onto the workpiece held by the chuck table at any position in a Z-axis direction orthogonal to the X-axis direction and the Y-axis direction,
a collimate lens and a beam splitter disposed on a first optical path connecting the laser oscillator and the condenser,
a wide band light source disposed on a second optical path branched by the beam splitter,
an optical fiber connected to the wide band light source, said optical fiber configured to direct wide band light at the beam splitter,
a gap adjusting mechanism including a holder attached to a part of the optical fiber, said gap adjusting mechanism configured to move the optical fiber to adjust a position of the end of the optical fiber relative to the collimate lens, and said gap adjusting mechanism including a motor coupled to the holder where the motor adjusts the position of the holder and the optical fiber,
a spectroscope that is disposed between the wide band light source and the beam splitter and that branches the laser beam from the second optical path to a third optical path,
a Z position detection unit that is disposed on the third optical path branched by the spectroscope and that detects a Z position in the Z-axis direction of the workpiece according to an intensity of light corresponding to a wavelength of return light that is generated when the light from the wide band light source is condensed by the condenser and is reflected by the workpiece held by the chuck table, and
a condenser moving mechanism that moves the condenser in the Z-axis direction according to the Z position.